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Position - Postdoctoral Research Fellow
Research Topics:
Fuel Cells: plasma polymerization, ion conducting membranes by PECVD, fuel cell electrodes by plasma deposition
Basic plasma physics: rf plasmas, plasma diagnostics, plasma Instabilities, electronegative plasmas
Astrophysical plasma physics: high-beta plasma, Alfven waves, double-layers, plasma instabilities
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Recent news and presentations:
World Hydrogen Energy Conference (16th June 2008):
Plasma technology serving the hydrogen economy
Australian Taxi Conference (April 2008):
Fuel cells, plasma technology and driving a hydrogen revolution.
Gaseous Electronics Meeting (February 2008):
Ion beam formation in a low-pressure geometrically expanding plasma.
Appeared on ABC Catalyst program (October 2007)
IPELS (August - 2007):
High-beta plasma effects in a low-pressure helicon plasma.
RSPHYSE School Seminar (June 2007):
Plasma technology serving the environment: Terrestrial and inter-planetary applications.
contact
e-mail:
cormac.corr@anu.edu.au
+61 2 6125 2828 (phone)
+61 2 6125 8552 (fax)
postal address
Space Plasma, Power & Propulsion Group
Research School of Physical Sciences & Engineering
The Australian National University
Canberra A.C.T. 0200
AUSTRALIA
publications
2008
20) C.S. Corr, E. Despiau-Pujo, P. Chabert, W. G. Graham, F. G. Marro and D. B. Graves, "Comparison between fluid simulations and experiments in inductively-coupled argon/chlorine plasmas". Journal of Physics D: Applied Physics 41 185202 (2008)
19) Cormac Corr, Rod Boswell, Nicolas Balcon, Cameron Samuell and Patrick Kennealy,
"Spatio-Temporal Pattern formation in an Atmospheric Plasma Discharge".
IEEE Transactions on Plasma Science, 36 4 (2008)
18) Cormac Corr, Jan Zanger, Rod Boswell, and Christine Charles,
"Spatial evolution of an ion beam created by a low-pressure geometrically expanding argon plasma".
Applied Physics Letters, 92 221508 (2008)
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2007
17) C. S. Corr and R. W. Boswell,
"High-beta plasma effects in a low-pressure helicon plasma".
PHYSICS OF PLASMAS 14, 122503 (2007) PDF (~1.0
MB)
16) Cormac Corr, Jan Zanger, Rod Boswell, and Christine Charles,
"Ion beam formation in a low-pressure geometrically expanding argon plasma".
Applied Physics Letters 91, 241501 (2007) PDF (~1.0
MB)
15) N. Plihon, P. Chabert, and C. S. Corr
"Experimental investigation of double layers in expanding plasmas".
Physics of Plasmas 14 013506 (2007) PDF (~1.0
MB)
14) G A Curley, D Maric, J-P Booth, C. S. Corr, P Chabert and J Guillon
"Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas
Plasma Sources Sci. Technol. 16 S87–S93 (2007) PDF (~1.0
MB)
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2006
13) P. Chabert, N. Plihon, C. S. Corr, J.-L. Raimbault and A. J. Lichtenberg
"Equilibrium model for two low-pressure electronegative plasmas connected by a double layer". Physics of Plasmas 13 093504 (2006) PDF (~1.0
MB)
12) S. Guilet, S. Bouchoule, C. Jany, C. S. Corr, and P. Chabert,
"Optimization of a Cl2–H2 inductively coupled plasma etching process adapted to nonthermalized InP wafers for the realization of deep ridge heterostructures".
Journal of Vacuum Science and Technology B 24 2381-2387 (2006). PDF (~1.0
MB)
11) C.S.Corr, N.Plihon and P. Chabert
"Transition from unstable electrostatic confinement to stable magnetic confinement in a helicon reactor operating with Ar/SF6 gas mixtures".
Journal of Applied Physics 99 103302 (2006). PDF (~1.0
MB)
10) Jean-Paul Booth, Cormac S. Corr, Garrett A. Curley, Tomas Földes, Jacques Jolly, and Jean Guillon
"Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy".
Applied Physics Letters 88 151502 (2006) PDF (~1.0
MB)
9) Jean-Paul Booth and Cormac Corr
"Metastable CF and CF2 molecules in CF4 inductively-coupled plasmas".
Plasma Sources Science and Technology 15 112–116 (2006). PDF (~1.0
MB)
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2005
8) S Dine, J-P Booth, G A Curley, C S Corr, J Jolly and J Guillon
"A novel technique for plasma density measurement using surface-wave transmission spectra". Plasma Sources Science and Technology 14 777–786 (2005). PDF (~1.0MB)
7) N. Plihon, C.S. Corr and P. Chabert
"Periodic formation and propagation of double layers in the expanding chamber of an inductive discharge in Ar/SF6".
Journal of Applied Physics 98 023306 (2005) PDF (~1.0MB)
6) C.S. Corr, P.G. Steen and W.G. Graham
"Temporal phenomena in Inductively Coupled Chlorine and Argon - Chlorine discharges".
Applied Physics Letters 86 141503 (2005). PDF (~1.0MB)
5) N. Plihon, C.S. Corr and P. Chabert
"Double layer formation due to negative ions in an expanding plasma source".
Applied Physics Letters 86 091501 (2005). PDF (~1.0MB)
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2004
4) C.S. Corr, N. Plihon, P. Chabert and R.W. Boswell
"Spatially limited ion acoustic activity in a low magnetic field helicon discharge".
Physics of Plasmas 11 4596 (2004). PDF (~1.0MB)
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2003
3) C.S. Corr, P.G. Steen and W.G. Graham
"Instability in a low-pressure inductively coupled oxygen plasma".
Plasma Sources Science and Technology 12 265-272 (2003). PDF (~1.0MB)
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2002
2) S.A. Rizvi, P.D. Maguire, C.M.O. Mahony, O.A. Okpalugo, C.S. Corr, W.G. Graham and S.M. Morley "Correlation of optical emission and ion flux with GaN etch rate in inductively coupled Ar/Cl2 plasma etching".
Physica-Status-Solidi-C 1, 112-115 (2002). PDF (~1.0MB)
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PhD Thesis
1) C.S. Corr
"A study of instabilities in electronegative rf-driven discharges".
Ph.D. Thesis (2003).
