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SP3 Publications

Highly Cited Publications


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Highly Cited & Significant Publications from Past Decade


C. CHARLES "A review of recent laboratory double layer experiments". Plasma Sources Science & Technology 16, R1-R25 (2007). PDF (~1.0 MB)

C. CHARLES, R.W. BOSWELL, "Laboratory evidence of a supersonic ion beam generated by a current-free "helicon" double-layer". Phys. Plasmas 11, 1706-1714 (2004). PDF (~200 kB)

C. CHARLES and R.W. BOSWELL, "Current-free double-layer formation in a high-density helicon discharge". Applied Physics Letters 82, 1356-1358 (2003). PDF (~60 kB)

X. SUN, A.M. KEESEE, C. BILOIU, E.E. SCIME, A. MEIGE, C. CHARLES and R.W. BOSWELL "Observations of ion-beam formation in a current-free double-layer". Physical Review Letters 95, 025004, 1-4 (2005). PDF (~260 kB)

R.W. BOSWELL, "Plasma physics: Cosmic waves in the lab". Nature 425, 352 - 353 (2003). PDF (~126 kB)


All Publications Sorted by Publication Year

2009

M.D. WEST, C. CHARLES and R.W. BOSWELL "A high sensitivity momentum flux measuring instrument for plasma thruster exhaust and diffusive plasmas". Review of Scientific Instruments 80, 053509 (2009). PDF (~230 kB)

A. CAILLARD, C. CHARLES, D. RAMDUTT, R.W. BOSWELL and P. BRAULT "Effect of Nafion and platinum content in a catalyst layer processed in a radio frequency helicon plasma system". Journal of Physics D: Applied Physics 42, 045207, (2009). PDF (~1.2 MB)


2008

C.S. CORR, E. DESPIAU-PUJO, P. CHABERT, W.G. GRAHAM, F.G. MARRO and D.B. GRAVES "Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas". Journal of Physics D: Applied Physics 4 Kad1, 185202, (2008). PDF (~320 kB)

W. COX, C. CHARLES, R.W. BOSWELL and R. HAWKINS "Spatial retarding field energy analyzer measurements downstream on a helicon double layer plasma". Applied Physical Letters 93, 071505, (2008). PDF (~127 kB)

C. CHARLES, R.W. BOSWELL, R. LAINE and P. MACLELLAN "An experimental investigation of alternative propellants for the helicon double layer thruster". Plasma Sources Science and Technology 17, 035028, 1-7 (2008). PDF (~240 kB)

A. CAILLARD, C. CHARLES, R.W. BOSWELL, A. MEIGE and P. BRAULT "Deposition of platinum catalyst by plasma sputtering for fuel cells: 3D simulation and experiments". Journal of Physics D: Applied Physics 41, 175213, (2008). PDF (~320 kB)

C.S. CORR, R.W. BOSWELL, C. CHARLES and J. ZANGER "Spatial evolution of an ion beam created by a geometrically expanding low-pressure argon plasma". Applied Physics Letters 92, 221508, 1-3 (2008). PDF (~250 kB)

E.E. SCIME, A.M. KEESEE and R.W. BOSWELL "Mini-conference on helicon plasma sources". Physics of Plasmas 15, 058301, 1-9 (2008). PDF (~800 kB)

M.D. WEST, C. CHARLES and R.W. BOSWELL "Testing a Helicon Double Layer Thruster Immersed in a Space-Simulation Chamber". Journal of Propulsion & Power 24, 1, 134-141 (2008). PDF (~900 kB)

W.T. LI, R.W. BOSWELL and J.D. FITZ GERALD "Boron nanobelts grown under intensive ion bombardment". Journal of Vacuum Science & Technology B26, 1, L7-L9 (2008). PDF (~230 kB)

A. CAILLARD, C. CHARLES, R.W. BOSWELL and P. BRAULT "Synthesis of Carbon Nanofibers and Pt-Nanocluster-Based Electrochemical Microsystems by Combining Low-Pressure Helicon Plasma Techniques". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~199 kB)

A. CAILLARD, C. CHARLES, R.W. BOSWELL and P. BRAULT "Transport and Deposition of Plasma-Sputtered Platinum Atoms: Comparison Between Experiments and Simulation". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~239 kB)

H. RABAT, C. ANDREAZZA, P. BRAULT, A.L. THOMANN, M. CAVARROC, Y. TESSIER, A. CAILLARD, C. CHARLES, R.W. BOSWELL AND P. BRAULT "TCP Plasma Sputtering of Nanostructured Fuel Cell Electrodes". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~231 kB)

F. GESTO, C. CHARLES, AND R.W. BOSWELL "Xenon Ion Beam Detachment From a Helicon Double Layer Thruster". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~285 kB)

W. COX, R. HAWKINS, C. CHARLES, AND R. BOSWELL "Three-Dimensional Mapping of Ion Density in a Double-Layer Helicon Plasma". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~219 kB)

C.S. CORR, R.W. BOSWELL, N. BALCON, C. SAMUELL AND P. KENNEALLY "Spatiotemporal Pattern Formation in an Atmospheric Plasma Discharge". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~256 kB)

C. CHARLES, R.W. BOSWELL P. ALEXANDER, C. COSTA, O. SUTHERLAND, L. PFITZNER, R. FRANZEN, J. KINGWELL, A. PARFITT, P.E. FRIGOT, J. DEL AMO AND G. SACCOCCIA"Operating the Helicon Double Layer Thruster in a Space Simulation Chamber". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~228 kB)

D. O'CONNELL, T. GANS, A. MEIGE, P. AWAKOWICZ AND R.W. BOSWELL "Plasma Ionization in Low-Pressure Radio-Frequency Discharges—Part I: Optical Measurements". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~140 kB)

A. MEIGE, D. O'CONNELL, T. GANS AND R.W. BOSWELL "Plasma Ionization in Low-Pressure Radio-Frequency Discharges—Part II: Particle-in-Cell Simulation". IEEE Transactions on Plasma Science 36, 4 (2008). PDF (~193 kB)

K. TAKAHASHI, C. CHARLES. R.W. BOSWELL AND R. HATAKEYAMA "Radial characterization of the electron energy distribution in a helicon source terminated by a double layer" Physics of Plasmas 15, 074505 (2008). PDF (~431 kB)

2007

A. CAILLARD, C. CHARLES, R.W. BOSWELL, P. BRAULT and C. COUTANCEAU "Plasma based platinum nanoaggregates deposited on carbon nanofibers improve fuel cell efficiency". Applied Physics Letters 90, 223119, 1-3 (2007). PDF (~2.0 MB)

A. CAILLARD, C. CHARLES, R.W. BOSWELL and P. BRAULT "Integrated plasma synthesis of efficient catalytic nanostructures for fuel cell electrodes". Nanotechnology 18, 305603, 1-9 (2007). PDF (~450 kB)

C.S. CORR and R.W. BOSWELL "High-beta plasma effects in a low-pressure helicon plasma". Physics of Plasmas 14, 122503, 1-7 (2007). PDF (~250 kB)

G.A. CURLEY, D. MARIC, J-P. BOOTH, C.S. CORR, P. CHABERT and J. GULLION "Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas". Plasma Sources, Science & Technology 16, S87-S93 (2007). PDF (~500 kB)

C.S. CORR, J. ZANGER, R.W. BOSWELL and C. CHARLES "Ion beam formation in a low-pressure geometrically expanding argon plasma". Applied Physics Letters 91, 241501, 1-3 (2007). PDF (~250 kB)

W.T. LI, D.A.P. BULLA and R.W. BOSWELL "Surface oxidation of Al masks for deep dry-etch of silica optical waveguides". Surface and Coatings Technology201, 4979-4983 (2007). PDF (~450 kB)

W.T. LI, R.W. BOSWELL, M. SAMOC, A. SAMOC and Q.H. QIN "Optical nonlinearity of oxygen-rich SiOx thin films". Electronic Letters 43, 4, 1-2 (2007). PDF (~113 kB)

A. MEIGE, N. PLIHON, G.J.M. HAGELAAR, J.-P. BOEUF, P. CHABERT and R.W. BOSWELL "Propagating double layers in electronegative plasmas". Physics of Plasmas 14, 053508, 1-11 (2007). PDF (~750 kB)

N. PLIHON, P. CHABERT and C.S. CORR "Experimental investigation of double layers in expanding plasmas". Physics of Plasmas 14, 013506, 1-16 (2007). PDF (~770 kB)

P. LINARDAKIS and G.G. BORG "Small-signal impedance of a radio frequency plasma capacitor". IEEE Microwave and Wireless Components Letters 17, 11, 763-765 (2007). PDF (~220 kB)

A. MEIGE, O. SUTHERLAND, H.B. SMITH and R.W. BOSWELL "Ion heating in the presheath". Physics of Plasmas 14, 032104, 1-7 (2007). PDF (~250 kB)

C. CHARLES and R.W. BOSWELL "The magnetic-field-induced transition from an expanding plasma to a double layer containing expanding plasma". Applied Physics Letters 91, 201505, 1-3 (2007). PDF (~200 kB)

K. TAKAHASHI, C. CHARLES, R.W. BOSWELL, T. KANEKO and R. HATAKEYAMA "Measurements of the energy distribution of trapped and free electrons in a current-free double layer". Physics of Plasmas 14, 114503, 1-4 (2007). PDF (~150 kB)

C. CHARLES "A review of recent laboratory double layer experiments". Plasma Sources Science & Technology 16, R1-R25 (2007). PDF (~1.0 MB)

N. BALCON, A. AANESLAND and R.W. BOSWELL "Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon". Plasma Sources Science & Technology 16, 217-225 (2007). PDF (~450 kB)

D. O'CONNELL, T. GANS, D. VENDER, U. CZARNETZKI and R.W. BOSWELL "Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge". Physics of Plasmas 14, 034505, 1-4 (2007). PDF (~550 kB)

C. CHARLES, D. RAMDUTT, P. BRAULT, A. CAILLARD, D. BULLA, R.W. BOSWELL, H. RABAT and A. DICKS "Low energy plasma treatment of a proton exchange membrane used for low temperature fuel cells". Plasma Physics and Controlled Fusion 49, A73-A79 (2007). PDF (~150 kB)

D. RAMDUTT, C. CHARLES, J. HUDSPETH, B. LADEWIG, T. GENGENBACH, R.W. BOSWELL, A. DICKS and P. BRAULT "Low energy plasma treatment of Nafion membranes for PEM fuel cells". Journal of Power Sources 165, 41-48 (2007). PDF (~150 kB)

K. TAKAHASHI, T. KANEKO AND R. HATAKEYAMA "Field-aligned and transverse plasma-potential structures induced by electron cyclotron waves". Applied Physics Letters 91, 261502, (2007). PDF (~588 kB)

A.J.-J. KADJO, P. BRAULT, A. CAILLARD, C.H. COUTANCEAU, J.-P. GARNIER AND S. MARTEMINIOV "Improvement of proton exchange membrane fuel cell electrical performance by optimization of operating parameters and electrodes preparation". Journal of Power Sources 172, 613-622 (2007). PDF (~85 kB)

2006

C. CHARLES, R.W. BOSWELL and M.A. LIEBERMAN "Xenon ion beam characterization in a Helicon Double Layer Thruster". Applied Physics Letters 89, 261503, 1-3 (2006). PDF (~290 kB)

A. AANESLAND and C. CHARLES "Plasma expansion from a a dielectric electron cyclotron resonance source". Physica Scripta T122, 19-24 (2006). PDF (~280 kB)


C. CHARLES, A. CAILLARD, P. BRAULT, R.W. BOSWELL, D. RAMDUTT, C. CORR, H. RABAT and A. DICKS "Laboratory Plasmas Applied to the Hydrogen Economy". Proceedings of the Alternate Transport Energies Conference (2006).

A. AANESLAND, C. CHARLES, M.A. LIEBERMAN and R.W. BOSWELL "Upstream ionization instability associated with a current-free double layer". Physical Review Letters 97, 075003, 1-4 (2006). PDF (~190 kB)

C.S. CORR, N. PLIHON and P. CHABERT "Transition from unstable electrostatic confinement to stable magnetic confinement in a helicon reactor operating with Ar/SF6 gas mixtures". Journal of Applied Physics 99, 103302, 1-6 (2006). PDF (~160 kB)

A. AANESLAND, C. CHARLES, M.A. LIEBERMAN and R.W. BOSWELL "Experiments and theory of an upstream ionization instability excited by an accelerated electron beam through a current-free electric double layer". Physics of Plasmas 13, 122101, 1-10 (2006). PDF (~332 kB)

N. SMITH, W. SKOCZYLAS S. KELLOGG, D. KINION, P. TESCH, O. SUTHERLAND, A. AANESLAND and R.W. BOSWELL "A High Brightness Inductively Coupled Plasma Source for High Current FIB Applications". Journal of Vacuum Science & Technology B 24, 6, 2902-2906 (2006).

M.A. LIEBERMAN, C. CHARLES and R.W. BOSWELL "A theory for formation of a low pressure, current-free double layer". Journal of Physics D: Applied Physics 39, 3294-3304 (2006). PDF (~173 kB)

P. BRAULT, S. ROUALDES, A. CAILLARD, A.-L. THOMANN, J. MATHIAS, J. DURAND, C. COUTANCEAU, J.-M. LEGER, C. CHARLES and R.W. BOSWELL "Solid polymer fuel cell synthesis by low pressure plasmas: a short review". The European Physical Journal: Applied Physics 34, 151-156 (2006).PDF (~750 kB)

M.A. LIEBERMAN and C. CHARLES "Theory for formation of a low-pressure, current-free double layer". Physical Review Letters 97, 045003, 1-4 (2006). PDF (~170 kB)

A. AANESLAND, N. SMITH and R.W. BOSWELL "High voltage breakdown in an inductively coupled ion source". Journal of Physics D: Applied Physics 39, 3588-3595 (2006). PDF (~280 kB)

M.A. LIEBERMAN and C. CHARLES "Theory for formation of a low-pressure, current-free double layer". Physical Review Letters 97, 045003, 1-4 (2006). PDF (~175 kB)

R.W. BOSWELL, E. MARSCH and C. CHARLES "The current-free electric double layer in a coronal magnetic funnel". The Astrophysical Journal 640, L199-L202 (2006). PDF (~400 kB)

F.N. GESTO, B.D. BLACKWELL, C. CHARLES and R.W. BOSWELL "Ion detachment in the Helicon Double Layer Thruster exhaust beam". Journal of Propulsion and Power 22, 1, 24-30 (2006). PDF (~7 MB)

C. CHARLES and R.W. BOSWELL "The magnetic-field-induced transition from an expanding plasma to a double layer containing expanding plasma". Applied Physics Letters 91, 201505, 1-3 (2007).

V.AU, C. CHARLES and R.W. BOSWELL "Interface creation and stress dynamics in plasma-deposited silicon dioxide films". Applied Physics Letters 88, 234103 (2006). PDF (~64 kB)

A.J.-J. KADJO, A. CAILLARD, P. BRAULT, C.H. COUTANCEAU, J.-PH. GARNIER, S. MARTEMINIOV, J. P. MAYE "Optimisation des performances de PEMFC-Influence des composants et modes d’assemblage". Congrès Français de Thermique, SFT 2006, Île de Ré, 16-19 (2006). PDF (~93 kB)

2005

A. AANESLAND, C. CHARLES, R.W. BOSWELL and M.A. LIEBERMAN "Grounded radio frequency electrodes in contact with high density plasmas". Physics of Plasmas 12, 103505, 1-7 (2005). PDF (~231 kB)

A. CAILLARD, P. BRAULT, J. MATHIAS, C. CHARLES, R.W. BOSWELL and T. SAUVAGE, "Deposition and diffusion of plantinum nanoparticles in porous carbon assisted by plasma sputtering". Surface & Coatings Technology 200, 391-394 (2005). PDF (~150 kB)

O. SUTHERLAND, M. GILES and R.W. BOSWELL, "Ion cyclotron production by a four-wave interaction with a helicon pump". Physical Review Letters 94, 205002, 1-4 (2005). PDF (~440 kB)

D. RAMDUTT, R. LUI, K. DAVIES, R.W. BOSWELL, C.G. dos REMEDIOS, C. CHARLES, M.M. BILEK and D.R. McKENZIE, "Development of the Nanotiter Plate for use in antibody and cell array technologies". Proceedings Biomedical Applications of Micro- and Nanoengineering II, SPIE Vol. 5651, (2005).

O. SUTHERLAND, C. CHARLES, N. PLIHON and R.W. BOSWELL, "Experimental evidence of a double layer in a large volume helicon reactor". Physical Review Letters 95, 205002, 1-4 (2005). PDF (~240 kB)

A.M. KEESEE, E.E. SCIME, C. CHARLES, A. MEIGE and R.W. BOSWELL "The ion velocity distribution function in a current-free double layer". Physics of Plasmas 12, 093502, 1-7 (2005). PDF (~260 kB)

X. SUN, A.M. KEESEE, C. BILOIU, E.E. SCIME, A. MEIGE, C. CHARLES and R.W. BOSWELL "Observations of ion-beam formation in a current-free double-layer". Physical Review Letters 95, 025004, 1-4 (2005). PDF (~260 kB)

C. CHARLES "Spatially resolved energy analyzer measurements of an ion beam on the low potential side of a current-free double-layer". IEEE Transactions on Plasma Science 33, 336-337 (2005). PDF (~120 kB)

M. PROSCHEK, Y. YIN, C. CHARLES, A. AANESLAND, D.R. McKENZIE, M.M. BILEK and R.W. BOSWELL "The effect of phase difference between powered electrodes on RF plasmas". Plasma Sources Science & Technology 14, 407-411 (2005). PDF (~367 kB)

C. CHARLES "High source potential upstream of a current-free electric double-layer". Phys. Plasmas 12, 044508, 1-4 (2005). PDF (~120 kB)

A. AANESLAND, C. CHARLES and R.W. BOSWELL "Fluctuation in a Helicon plasma with additional immersed antenna". IEEE Transactions on Plasma Science 33, 360-361 (2005). PDF (~101 kB)

A. MEIGE, R.W. BOSWELL, C. CHARLES and M.M. TURNER "One-dimensional particle-in-cell simulation of a current-free double-layer in an expanding plasma". Phys. Plasmas 12, 052317, 1-10 (2005). PDF (~400 kB)

A. MEIGE, R.W. BOSWELL, C. CHARLES, J.-P. BOEUF, G. HAGELAAR and M.M. TURNER "One-dimensional simulation of an ion beam generated by a current-free double-layer". IEEE Transactions on Plasmas Science 33, 2, 334-335 (2005). PDF (~100 kB)

A. MEIGE, M. JARNYK, D.T.K. KWOK and R.W. BOSWELL "Particle-in-cell simulation of an electron shock wave in a rapid rise time plasma immersion ion implantation process". Physics of Plasmas 12, 043503, 1-4 (2005). PDF (~50 kB)

2004

P. BRAULT, A. CAILLARD, A.L. THOMANN, J. MATHIAS, C. CHARLES, R.W. BOSWELL, S. ESCRIBANO, J. DURAND and T. SAUVAGE, "Plasma sputtering deposition of platinum into porous fuel cell electrodes". Journal of Physics D: Applied Physics 37, 3419-3423 (2004). PDF (~600 kB)

C.S. CORR, N. PLIHON, P. CHABERT, O. SUTHERLAND and R.W. BOSWELL, "Spatially limited ion acoustic wave activity in low-pressure helicon discharges". Physics of Plasmas 11, 10, 4596-4602 (2004). PDF (~100 kB)

O. SUTHERLAND, J. KELLER, M. IRZYK and R.W. BOSWELL, "Comparison between experiment and two simulation strategies for the extraction of focused ion beams". Review of Scientific Instruments 75, 7, 2379-2386 (2004). PDF (~400 kB)

A. AANESLAND, C. CHARLES, R.W. BOSWELL and A. FREDRIKSEN, "Helicon plasma with additional immersed antenna". Journal of Physics D: Applied Physics 37, 1334-41 (2004). PDF ~237 kB

C. CHARLES, R.W. BOSWELL, "Time development of a current-free "helicon" double-layer". Phys. Plasmas 11, 3808-3812 (2004). PDF (~150 kB)

C. CHARLES, R.W. BOSWELL, "Laboratory evidence of a supersonic ion beam generated by a current-free "helicon" double-layer". Phys. Plasmas 11, 1706-1714 (2004). PDF (~200 kB)

D.A.P. BULLA, W.T. LI, C. CHARLES, R.W. BOSWELL, A. ANKIEWICZ and J. LOVE, "Deposition and characterization of silica-based films by helicon-activated reactive evaporation applied to optical waveguide fabrication." Applied Optics 43, 2978-2985 (2004). PDF (~322 kB)

C. CHARLES, "Hydrogen ion beam generated by a current-free double-layer in a helicon plasma". Applied Physics Letters 84, 332-334 (2004). PDF (~130 kB)

R.W. BOSWELL, O. SUTHERLAND, C. CHARLES, J.P. SQUIRE, F.R. CHANG DIAZ, T.W. GLOVER, V.T. JACOBSON, D.G. CHAVERS, R.D. BENGSTON, E.A. BERING III, R.H. GOULDING and M. LIGHT "Experimental evidence of parametric decay in the variable specific impulse magnetoplasma rocket (VASIMR) helicon plasma source". Physics of Plasmas 11, 11, 5125-5129 (2004). PDF (~90 kB)

2003

R.W. BOSWELL, "Plasma physics: Cosmic waves in the lab". Nature 425, 352 - 353 (2003). PDF (~126 kB) 

C. CHARLES and R.W. BOSWELL, "Current-free double-layer formation in a high-density helicon discharge". Applied Physics Letters 82, 1356-1358 (2003). PDF (~60 kB)

H.B. SMITH, C. CHARLES and R.W. BOSWELL, "Breakdown behavior in radio-frequency argon discharges". Physics of Plasmas 10, 875-881 (2003).

C. CHARLES, R.W. BOSWELL and M.A. LIEBERMAN, "Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna". Physics of Plasmas 10, 891-899 (2003). PDF (~118 kB)

J.P. SQUIRE, F.R.C. DIAZ, T.W. GLOVER, V.T. JACOBSON, D.G. CHAVERS, R.D. BENGTSON, E.A. BERING, R.W. BOSWELL, R.H. GOULDING and M. LIGHT, "Progress in experimental research of the VASIMR engine". Transactions of Fusion Science and Technology 43, 1T, 111-117 (2003).

A. AANESLAND, C. CHARLES, R.W. BOSWELL and A. FREDRIKSEN, "Sputtering effects in a helicon plasma with an additional immersed antenna". Plasma Sources Science and Technology 12, 85-88 (2003). PDF (~122 kB)

W.T. LI, D.A.P. BULLA, J. LOVE, B. LUTHER-DAVIES, C. CHARLES and R.W. BOSWELL, "Hydrogen contamination in Ge-doped SiO2 thin films prepared by helicon activated reactive evaporation". Journal of Vacuum Science and Technology B, 21, 792-796 (2003).

C. CHARLES "Wall effects on the chemistry in a pulsed oxygen/silane radiofrequency helicon plasma". Journal of Physics D: Applied Physics 36, 1-7 (2003). PDF (~200 kB)

2002

C. CHARLES "Effects of cross field diffusion in a low pressure high density oxygen/silane plasma". Journal of Vacuum Science and Technology A20, 4, 1275-1283 (2002). PDF (~240 kB)

W.T. LI, D.A.P. BULLA, C. CHARLES, R.W. BOSWELL, J. LOVE and B. LUTHER-DAVIES, "Ge-doped SiO2 thin films produced by helicon activated reactive evaporation". Thin Solid Films 82, 419 (2002).

A. PERRY, G. CONWAY, R.W. BOSWELL and H. PERSING, "Modulated plasma potentials and cross field diffusion in a Helicon plasma". Physics of Plasmas 9, 3171-3177 (2002). PDF (~100 kB)

J. SCHARER, A. DEGELING, G. BORG and R.W. BOSWELL, "Measurements of helicon wave propagation and ArII emission". Physics of Plasmas 9, 3734-3742 (2002).

A.L. THOMANN, J.P. ROZENBAUM, P. BRAULT, C. ANDREAZZA, R. ANDREAZZA, B. ROUSSEAU, H. ESTRADE-SZWARCKOPF, A. BERTHET, J.C. BERTONLINI, F.J.C.S AIRES, F. MONNET, C. MIRODATOS, C. CHARLES and R.W. BOSWELL, "Plasma synthesis of catalytic thin films". Pure and Applied Chemistry 74, 471-474 (2002).

2001

2000

C. CHARLES, A.W DEGELING, T.E. SHERIDAN, J.H. HARRIS, M.A. LIEBERMAN and R.W. BOSWELL, "Absolute measurements and modeling of radio frequency electric fields using a retarding field energy analyzer". Physics of Plasmas 7, 5232-5241 (2000). PDF (~160 kB)

P. CHABERT, N. PROUST, J. PERRIN and R.W. BOSWELL, "High rate etching of 4H-SiC using a SF6/O-2 helicon plasma". Applied Physics Letters 76, 16, 2310-2312 (2000). PDF (~198 kB)

K. GAFF, A. DURANDET, T. WEIJERS, J. LOVE and R.W. BOSWELL, "Strong photosensitivity in tin-doped silica films". Electronics Letters 36, 842-843 (2000).

1999

P. CHABERT, T.E SHERIDAN, R.W. BOSWELL and J. PERRIN, "Electrostatic probe measurement of the negative ion faction in an SF6 helicon discharge". Plasma Sources Science and Technology 8, 561-566 (1999). PDF (~137 kB)


T.E SHERIDAN, N. ST. J. BRAITHWAITE and R.W. BOSWELL, "Relation between double layers and flux for a collisionless discharge with two negative components". Physics of Plasmas 6, 4375-4381 (1999).

T.E SHERIDAN, P. CHABERT and R.W. BOSWELL, "Positive ion flux from an electronegative discharge". Plasma Sources Science and Technology 8, 457-462 (1999).

1998

M.A. LIEBERMAN and R.W. BOSWELL, "Modeling the Transitions from Capacitive to Inductive to Wave-Sustained RF Discharges". Le Journal de Physique IV, 8, PR7, 145-164 (1998). PDF (~798 kB)

1996

F. R. ELLINGBOE and R.W. BOSWELL, "Capacitive, inductive and helicon-wave modes of operation of a helicon plasma source". Physics of Plasmas 3, 2797-2804 (1996).

M. PEIGNON, C. CARDINAUD, G. TURBAN, C. CHARLES and R.W. BOSWELL, "X-ray photoelectron study of the reactive ion etching of SixGe1-x alloys in SF6 plasmas". Journal of Vacuum Science & Technology A14, 156-164 (1996).

1995

C. CHARLES and R.W. BOSWELL, "Effect of wall charging on an oxygen plasma created in a helicon diffusion reactor used for silica deposition". Journal of Vacuum Science & Technology A13, 2067-2073 (1995). PDF (~230 kB)

C. CHARLES and R.W. BOSWELL, "Breakdown, steady-state and decay regimes in pulsed oxygen helicon diffusion plasmas". Journal of Applied Physics 78, 766-773 (1995). PDF (~1 mB)

C. CHARLES, R.W. BOSWELL and H. KUWAHARA, "SiO2 deposition from oxygen/silane pulsed helicon diffusion plasmas". Applied Physics Letters 67, 40-42 (1995). PDF (~73 kB)

R.W. BOSWELL and D. VENDER, "An experimental study of breakdown in a pulsed Helicon plasma". Plasma Sources Sci. Technol. 4, 534-540 (1995). PDF (~488 kB)

1991

R.A. GOTTSCHO, T. NAKANO, N. SADEGHI, D.J. TREVOR and R.W. BOSWELL, "Ion velocity distributions in electron cyclotron resonance plasmas". SPIE Volume 1594 Process Module Metrology, Control and Clustering, 376-381 (1991).

A.J. PERRY, D. VENDOR AND R.W. BOSWELL, "The application of the helicon source to plasma processing".  J. Vac. Sci. Technol. B 9(2), Mar/Apr (1991). PDF (~734 kB)

 

 




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